Highly sensitive MOEMS integrated photonic crystal cavity resonator for nano-mechanical sensing

摘要

A Micro-Opto-Electro-Mechanical-Systems integrated photonic crystal cavity resonator based sensor is proposed for nano-mechanical sensing applications. Two configurations of nano-mechanical sensor based on a mechanical bridge i.e. fixed at one end and both the ends are proposed. The configurations are applied for pressure sensing, and a comparative analysis between both the designs are presented. The resonant wavelength and their shift are investigated for various quantitative and qualitative parameters such as displacement and applied pressure. The average sensitivity of photonic crystal nano-cavity resonator based structure, i.e. fixed at one end and both ends are obtained as 68.296 nm/MPa in the range of 0-0.10 MPa; and 0.134 nm/MPa in the range of 0-400 MPa, respectively. The proposed design shows great potential to realize wide range highly sensitive pressure sensors. (C) 2020 Elsevier B.V. All rights reserved.