Three-dimensional colloidal interference lithography

摘要

Light interactions with colloidal particles can generate a variety of complex three-dimensional (3D) intensity patterns, which can be utilized for nanolithography. The study of particle-light interactions can add more types of intensity patterns by manipulating key factors. Here we investigate a novel 3D nanolithography technique using colloidal particles under two-beam coherent illuminations. The fabricated 3D nanostructures are hollow, nested within periodic structures, and possess multiple chamber geometry. The effects of incident angles and particle size on the fabricated nanostructures were examined. The relative phase shift between particle position and interference pattern is identified as another significant parameter influencing the resultant nanostructures. A numerical model has been developed to show the evolution of nanostructure geometry with phase shifts, and experimental studies confirm the simulation results. Through the introduction of single colloidal particles, the fabrication capability of Lloyd's mirror interference can now be extended to fabrication of 3D nanostructure with complex shell geometry. The fabricated hollow nanostructures with grating background could find potential applications in the area of photonics, drug delivery, and nanofluidics.