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Facile fabrication and formation mechanism of aluminum nanowire arrays

机译:铝纳米线阵列的容易制造和形成机理

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Anodized alumina membranes (AAMs) have proven effective at making vertically-oriented and well-ordered metal nanowire arrays, which are useful in plasmonics and electrochemistry. Here, we produced Al nanowires via directed AAM pore nucleation: a patterned oxide mask on a flat Al surface directed where pores did and did not form, the pores acting to oxidize Al around the sites without pores. This left Al nanowires embedded in the AAM, and produced freestanding Al nanowires after etching the AAM. The nanowire tops had two distinct contours, smooth bowls and flat rough surfaces-suggesting that nanowires with bowl tops result from slow pore development relative to pattern-nucleated pores, not pore blockage as prior literature suggests. The observed low porosity of similar to 2%, as opposed to the more typical 10%, suggests pore nucleation in the electrolyte employed may need greater local variations in electric field or pH, possibly explaining the electrolyte's peculiar ability to make Al nanowires. Finally, a soft nano-imprint lithography process was developed here to pattern the mask without damaging the stamp, avoiding a stamp degradation problem in previous work that utilized hard nano-imprint lithography.
机译:阳极氧化氧化铝膜(AAMS)已证明有效地制造垂直导向的和有序有序的金属纳米线阵列,这些纳米线阵列可用于血管科和电化学。在这里,我们通过定向AAM孔成核来产生Al纳米线:在孔隙所示并且不形成孔的平坦的Al表面上的图案化氧化物掩模,其作用于在没有孔的位置氧化的孔。在蚀刻AAM之后,将左侧填充在AAM中的左右纳米线,并在蚀刻AAM之后生产独立的Al纳米线。纳米线顶部有两个不同的轮廓,光滑的碗和平坦的粗糙表面 - 表明纳米线与碗上面的含有慢孔隙发育相对于模式成核毛孔,而不是作为现有文学的孔隙堵塞。所观察到的低孔隙率类似于2%,而不是更典型的10%,表明所用电解质中的孔成核可能需要更大的电场或pH的局部变化,可能解释了电解质的制造Al纳米线的特殊能力。最后,此处开发了一种软纳米压印光刻工艺,以在不损坏印模的情况下进行图案,避免了使用硬纳米印记光刻的先前工作中的印章退化问题。

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