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A new approach for improving the silicon texturing process using gas-lift effect

机译:利用气举效应改善硅制绒工艺的新方法

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A new cost-effective and efficient approach is proposed for texturing the crystalline silicon using the gas-lift effect (GLE). The advantages of this approach over the conventional ones are that significantly lower amounts of IPA is used and much shorter etching time is required to achieve the same reflectivity. GLE is generated by taking advantage of the hydrogen bubbles evolved between the silicon wafer being etched and a glass plate, placed in parallel, creating a gap of 12mm. This effect then acts as a pumping mechanism detaching more bubbles from the silicon surface, accelerating them to the top and out of the system, as quickly as they are generated. Experiments were carried out with various combinations of TMAH/IPA concentrations for two different GLE conditions to analyse and determine their influence on etching time, etching rate, surface morphology and reflectivity of the textured silicon surface. The use of this new approach in surface texturing, allowed the reduction of the required IPA by 50% and etching time by more than 60% to achieve the same reflectivity. This can ultimately lead to a significant reduction in cost by increasing the efficiency of the texturing process. A combination of 3.5% IPA and 2mm GLE resulted in a textured silicon surface having a low specular solar-weighted reflectivity of 0.15%.
机译:提出了一种新的具有成本效益和效率的方法,以利用气举效应(GLE)来使晶体硅纹理化。与传统方法相比,此方法的优势在于,使用IPA的量明显减少,并且需要很短的蚀刻时间才能获得相同的反射率。通过利用被蚀刻的硅晶片和平行放置的玻璃板之间产生的氢气泡产生GLE,产生12mm的间隙。然后,这种效果就可以用作一种泵送机制,将更多的气泡从硅表面分离出来,并尽快将其加速到顶部并从系统中排出。针对两种不同的GLE条件,使用TMAH / IPA浓度的各种组合进行了实验,以分析和确定它们对刻蚀时间,刻蚀速率,表面形态和织构硅表面反射率的影响。在表面纹理化中使用这种新方法可以使所需IPA减少50%,蚀刻时间减少60%以上,以实现相同的反射率。通过增加纹理化过程的效率,最终可以最终显着降低成本。 3.5%IPA和2mm GLE的组合产生了具有纹理化的硅表面,该表面的镜面太阳光反射加权反射率低至0.15%。

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