Silicon-based filters, resonators and acoustic channels with phononic crystal structures

摘要

This paper discusses the phenomenon of phononic crystal silicon-based filters, resonators and acoustic channels structured in geometrical periodic arrays created by a single silicon material. Component structured geometrical periodic array refers to a structure of square stubbed rods arranged in repeated arrays on a silicon plate. The study discovered that the band gap of the phononic crystal structure can be modulated under different heights and rotational angles of periodically arrayed square stubbed rods. In addition to band gap modulation, we used the finite element method (FEM) and supercell techniques to analyse the resonance characteristics of defect-containing phononic crystal structures with a larger band gap size design. In addition, the paper also investigated the effects on acoustic channels. Previous studies have already analysed defect-containing resonator and channel phenomenon by the plane-wave expansion method with supercell techniques. However, the FEM can solve numerical issues of extreme difficulty to reach convergence. The results of this study elaborated on the manufacturing feasibility of silicon-based acoustic resonance and filter devices under a complementary metal-oxide- semiconductor synchronization process.