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Fundamentals of thermo-sonic copper wire bonding in microelectronics packaging

机译:微电子封装中热超声铜线焊的基本原理

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Fine copper wire bonding is capable of making reliable electrical interconnections in microelectronic packages. Copper wires of 0.8-6 mil diameter have been successfully bonded to different bond pad metallized and plated substrate materials such as Al, Cu, Ag, Au and Pd. The three metallurgical related factors; solid-solubility and diffusion of dissimilar contact metals, oxide film breakage and plastic deformation of asperities play a critical role in the bonding. Plastic deformation of an asperity is the most significant factor one has to consider to attain good bonding. Soft aluminum metal (30-40 VHN), with a lower % asperity threshold deformation is easier to wire bond than harder metallic surfaces (Ni, W, Mo, Cr, Co, Ta) of 150-500 VHN. Good adhesion of wire bonding is achieved for the surface roughness (Ra) of 0.01-0.15 mu m and 0.02-0.6 mu m of bare and plated surfaces respectively. It is rationalized that the application of ultrasonic energy principally breaks the oxide film and deform the asperities, while a compressive force increases the proximity of asperities. Hence wire welds to bond pad surface by molecular attraction and inter diffusion. Storage of copper ball bonds at 175 degrees C for 100-1,000 h forms copper aluminide at the interface. EDAX and Auger analysis reveal 22 at% Al + 78 at% Cu composition of the aluminides and Cu3Al2 empirical formula is calculated, which, does not match with any of the reported copper aluminides. Hardness of the copper ball bonds and stitch bonds are higher than wire exhibiting work hardening of the bonds on processing.
机译:细铜线键合能够在微电子封装中实现可靠的电互连。直径为0.8-6密耳的铜线已成功地粘结到不同的焊盘上,这些金属镀层和镀层的基材材料例如Al,Cu,Ag,Au和Pd。三个冶金相关因素;异种接触金属的固溶性和扩散,氧化膜破裂和粗糙物的塑性变形在键合中起关键作用。要获得良好的粘合效果,粗糙的塑性变形是最重要的因素。与150-500 VHN的较硬金属表面(Ni,W,Mo,Cr,Co,Ta)相比,具有较低的粗糙度阈值变形百分比的软铝金属(30-40 VHN)更易于引线键合。裸露和电镀表面的表面粗糙度(Ra)分别为0.01-0.15微米和0.02-0.6微米时,可以获得良好的引线键合粘合性。合理地讲,施加超声波能量主要是使氧化膜破裂并使粗糙面变形,而压缩力会增加粗糙面的接近度。因此,导线通过分子吸引和相互扩散而焊接到焊盘表面。铜球键在175摄氏度下储存100-1,000小时会在界面处形成铝化铜。 EDAX和Auger分析显示铝化物的铝含量为22 at%+ Cu的含量为78 at%,并且计算了Cu3Al2的经验公式,该公式与任何已报道的铝化铜都不匹配。铜球键合和针脚键合的硬度高于在加工过程中表现出键合功硬化的导线。

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