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Precision grinding of optical glass with laser micro-structured coarse-grained diamond wheels

机译:用激光微结构粗金刚石砂轮精密研磨光学玻璃

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摘要

This paper presents a series of micro-structured coarse-grained diamond wheels for optical glass surface grinding aiming to improve the grinding performance, especially subsurface damage. The 150 μm grit size, single layer electroplated diamond grinding wheels with different interval micro-groove arrays were manufactured by nanosecond pulsed laser, successfully. The influence of micro-structures on surface roughness and subsurface damage was investigated. Compared with conventional coarse-grained diamond wheel, the subsurface damage depth was reduced effectually from 5 to 1.5 μm, although the better surface roughness was not obtained by the micro-structured coarse-grained diamond wheel. In addition, the surface roughness and subsurface damage depth were both reduced with the decreasing interval of micro-groove arrays.
机译:本文提出了一系列用于光学玻璃表面磨削的微结构粗晶粒金刚石砂轮,旨在提高磨削性能,尤其是改善表面损伤。用纳秒脉冲激光成功地制造了粒度为150μm的具有不同间隔微槽阵列的单层电镀金刚石砂轮。研究了微观结构对表面粗糙度和亚表面损伤的影响。与传统的粗粒金刚石砂轮相比,尽管微结构的粗粒金刚石砂轮无法获得更好的表面粗糙度,但其表面损伤深度有效地从5μm减小至1.5μm。另外,随着微槽阵列间隔的减小,表面粗糙度和表面损伤深度均减小。

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