Effects of annealing temperature on structure and opt-electric properties of ion-conducting LLTO thin films prepared by RF magnetron sputtering

摘要

Highly transparent and ion-conducting lithium lanthanum titanate (LLTO) thin films were deposited on ITO/glass substrates by RF magnetron sputtering. The results of X-ray diffraction indicate that the as-prepared LLTO thin films and the annealed ones at temperatures up to 300 °C are amorphous; however, crystal phases, including La_(0.56)Li_(0.33)TiO_3 and other unexpected ones, appear on the annealed films at 400 °C. SEM and AFM results show that the prepared films turn to be denser, smoother and more uniform up to 300 °C while the deteriorative results come out following the further enhancement of annealing temperature.