Study of the thermal dependence of mechanical properties, chemical composition and structure of nanocomposite TiC/a-C:H coatings

摘要

This work is aimed at the study of thermal stability of nc-TiC/a-C:H coatings deposited on steel substrates by unbalanced reactivemagnetron sputtering of titanium in an acetylene containing atmosphere. The as-deposited coatings show high hardness and elastic modulus together with low wear and low friction coefficients. The coating properties were investigated as a function of annealing temperature using thermal desorption spectroscopy under UHV conditions. The hardness and elastic modulus did not change substantially up to 700 °C compared to the properties of the as-deposited coatings. Themost significant changeswere observed in case of their fracture toughness,which decreased due to the hydrogen loss from amorphous carbon matrix.