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Applications of combined ion implantation for improved tribological performance

机译:组合离子注入在改善摩擦学性能方面的应用

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摘要

Ion implantation set-up on the base of ion gun with target sputtering by Penning discharge plasma was created. The set-up allows to conduct implantation of ions of various materials with an implantation current of 100μA/cm~2 at acceleration voltage of up to 30kV. Combined implantation of TiB_2 compound and Argon or Nitrogen were applied for surface properties modification of WC-Co hard alloy and SKD11 steel. The effect of implantation on mechanical and tribological properties has been studied and discussed with respect to implantation fluence. It was shown that the main effect of implantation is the modification of thin surface layer with formation of Ti, B, N_2 - base compounds, which leads to modification of surface adhesion interaction and wear resistance improvement. Examples of application to real products are presented.
机译:通过Penning放电等离子体,在具有靶溅射的离子枪基础上建立了离子注入装置。该设置允许在高达30kV的加速电压下以100μA/ cm〜2的注入电流进行各种材料的离子注入。 TiB_2化合物与氩或氮的联合注入用于WC-Co硬质合金和SKD11钢的表面性能改性。关于注入注量,已经研究和讨论了注入对机械和摩擦学性能的影响。结果表明,注入的主要作用是通过形成Ti,B,N_2-基化合物来改性表面薄层,从而改善了表面附着力,改善了耐磨性。给出了在实际产品中的应用示例。

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