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Silver Diffusion in Organic Optoelectronic Devices: Deposition-Related Processes versus Secondary Ion Mass Spectrometry Analysis Artifacts

机译:有机光电子器件中的银扩散:与沉积相关的过程与二次离子质谱分析伪像

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The development of organic optoelectronic devices relies on controlling interfaces during thin-film deposition and requires an accurate characterization of the film composition at these interfaces. Dynamic secondary ion mass spectrometry (SIMS) is widely used to investigate multilayer thin-film structures. Routine analysis protocols are well established for classical semiconductor samples, but for organic or mixed metallic organic samples the limitations of the technique are less well established. In the current work, low-energy dynamic SIMS is used on metal-organic multilayered model structures similar to those in organic optoelectronic devices to study the origin of diffusion of metal into the organic layer (e.g., irradiation-induced diffusion during SIMS analysis or during the deposition process). Samples contain silver and organic compounds sequentially deposited by thermal evaporation in vacuum onto a Si substrate. They are analyzed using 4 250 eV to 1 keV Cs+ primary ion beam. It is found that the mixing of silver into the organic layer depends on the impact energy and the conditions for sample preparation. This irradiation effect can be minimized by a back-side depth profiling approach, which was developed in this work. By applying this method, it is shown that some silver is likely to diffuse into the organic layers during the deposition process.
机译:有机光电器件的开发依赖于在薄膜沉积过程中控制界面,并且需要在这些界面处对膜组成进行准确的表征。动态二次离子质谱(SIMS)被广泛用于研究多层薄膜结构。常规分析规程对于经典的半导体样品已经很好地建立了,但是对于有机或混合金属有机样品来说,该技术的局限性还不那么理想。在当前的工作中,低能量动态SIMS用于类似于有机光电器件的金属有机多层模型结构,以研究金属扩散到有机层中的起源(例如,在SIMS分析过程中或在辐照过程中辐照引起的扩散)沉积过程)。样品中包含银和有机化合物,它们通过真空热蒸发依次沉积在Si基板上。使用4 250 eV至1 keV Cs +初级离子束对它们进行分析。发现银混入有机层取决于冲击能量和样品制备条件。通过本工作中开发的背面深度轮廓分析方法,可以使这种照射效果最小化。通过应用该方法,表明在沉积过程中一些银很可能扩散到有机层中。

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