Contamination Control IN and OUT of the Cleanroom: Airborne Molecular Contamination, Part 1: Silent Poison

摘要

Airborne Molecular Contamination (AMC) can be a "silent poisoner" of your process and product. AMC is any unwanted organic or inorganic molecule that is carried by the air to the surface of the product. The world of wafer fabrication categorizes AMC as acids, bases, condensables, and dopants. In a more global sense, AMC is productively thought of as any molecule carried by the air that masks or reacts with the surface. If you are involved in semiconductors, nanodevices, or critical aerospace applications, AMC is an obvious concern. If you are involved in production that does not use a cleanroom, such as engineered coatings or consumer-oriented products, consider how controlling AMC can improve your product yield and product performance.