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首页> 外文期刊>Optics Letters >High-numerical-aperture microlens shape measurement with digital holographic microscopy
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High-numerical-aperture microlens shape measurement with digital holographic microscopy

机译:用数字全息显微镜进行高数值孔径微透镜形状测量

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摘要

In this Letter, we introduce an algorithm that overcomes limitations in shape measurement by holographic microscopic methods in cases of micro-optical elements with high NA, such as microlenses. The presented algorithm provides a simple method for shape reconstruction from interferometrically measured phase. The algorithm is based on the analysis of local ray transition through the measured object. We develop algorithms for holographic configurations working in transmission and reflection. The accuracy of the developed algorithms is proved by experiments and extensive simulations. We present an experiment in a holographic Mach-Zehnder configuration where we have measured and successfully reconstructed the height distribution of spherical and cylindrical microlenses with NA up to 0.3.
机译:在这封信中,我们介绍了一种算法,该算法可克服在具有高NA的微光学元件(例如微透镜)的情况下通过全息显微方法进行形状测量的局限性。所提出的算法提供了一种从干涉测量的相位重建形状的简单方法。该算法基于对通过被测物体的局部光线跃迁的分析。我们开发用于透射和反射的全息配置的算法。实验和广泛的仿真证明了所开发算法的准确性。我们提出了全息Mach-Zehnder配置的实验,我们已经测量并成功重建了NA最高为0.3的球形和圆柱形微透镜的高度分布。

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