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In situ correction of windows' linear birefringence in ellipsometry measurements

机译:椭偏测量中窗口线性双折射的原位校正

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摘要

Exact method for in situ correction of windows' linear birefringence in ellipsometry measurements with an isotropic sample is presented. The method is based on the idea that an unpolarized light is unaffected by a retarding optical element. An optical system was built, in order to simulate an ellipsometry measurement cell with windows with large retardation. The system consisted of two configurations, an "ideal" configuration in which optical retarders were used as windows, and a real life configuration in which sapphire slabs were used as windows. For the measurements with sapphire windows, the ellipsometric parameters of the gold mirror and the nickel foil without the correction yields (psi, DELTA)_(Au) velence (0.66(+-0.005), 1.56(+-0.05)), (psi, DELTA)_(Ni) velence (-0.713(+-0.005), 1.4(+-0.05)). While after the correction the parameters yields (psi, DELTA)_(Au) velence (0.704(+-0.006),2.15(+-0.1)), (psi,DELTA)_(Ni) velence (0.619(+-0.005), 2.33 (+-0.05)), which are in good agreement with our calibration measurements: (psi,DELTA)_(Au) velence (0.709(+-0.005), 1.98(+-0.06)) and (psi, DELTA)_(Ni) velence (0.615(+-0.005),2.32(+-0.05)).
机译:提出了一种在各向同性的椭偏测量中对窗的线性双折射进行原位校正的精确方法。该方法基于这样的思想,即非偏振光不受延迟光学元件的影响。建立了一个光学系统,以模拟具有较大延迟的窗口的椭偏测量单元。该系统由两种配置组成,一种是“理想”配置,其中将光延迟器用作窗口,另一种是现实生活中的配置,其中将蓝宝石平板用作窗口。对于使用蓝宝石窗口的测量,金镜和镍箔的椭偏参数无需校正屈服(psi,DELTA)_(Au)velence(0.66(+-0.005),1.56(+-0.05)),(psi ,Δ)_(Ni)velence(-0.713(+-0.005),1.4(+-0.05))。校正后参数产生(psi,DELTA)_(Au)velence(0.704(+-0.006),2.15(+-0.1)),(psi,DELTA)_(Ni)velence(0.619(+-0.005) ,2.33(+ -0.05)),与我们的校准测量值非常吻合:(psi,DELTA)_(Au)velence(0.709(+-0.005),1.98(+-0.06))和(psi,DELTA) _(Ni)velence(0.615(+-0.005),2.32(+-0.05))。

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