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Nanoimprint lithography 20 years on

机译:纳米压印光刻20年

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摘要

To celebrate the 20th anniversary of nanoimprint lithography (NIL) we present a perspective of how the technique and its prospects have evolved over the past two decades. We describe how it overcame certain fabrication challenges at the time it was first reported and look at some of the obstacles that hindered uptake in industry initially, as well as likely sectors for future successful commercial deployment. Developments in the technique since that are making NIL increasingly attractive such as 'moving roll to roll' for higher throughput, are also described.
机译:为了庆祝纳米压印光刻技术(NIL)诞生20周年,我们对技术及其前景在过去的二十年中如何发展提出了看法。我们描述了它在首次报道时是如何克服某些制造挑战的,并探讨了一些最初阻碍工业采用的障碍,以及将来成功进行商业部署的可能领域。还描述了自此以来使NIL越来越有吸引力的技术发展,例如“滚动移动”以提高生产率。

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