Synthesis of conducting transparent few-layer graphene directly on glass at 450°C

摘要

Post-growth transfer and high growth temperature are two major hurdles that research has to overcome to get graphene out of research laboratories. Here, using a plasma-enhanced chemical vapour deposition process, we demonstrate the large-area formation of continuous transparent graphene layers at temperatures as low as 450°C. Our few-layer graphene grows at the interface between a pre-deposited 200nm Ni catalytic film and an insulating glass substrate. After nickel etching, we are able to measure the optical transmittance of the layers without any transfer. We also measure their sheet resistance directly and after inkjet printing of electrical contacts: sheet resistance is locally as low as 500Ωsq ~1. Finally the samples equipped with printed contacts appear to be efficient humidity sensors.