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Coherently Strained Si-SixGe1-x Core-Shell Nanowire Heterostructures

机译:相干应变的Si-SixGe1-x核壳纳米线异质结构

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Coherently strained Si-SixGe1-x core-shell nanowire heterostructures are expected to possess a positive shell-to-core conduction band offset, allowing for quantum confinement of electrons in the Si core. We report the growth of epitaxial, coherently strained Si-SixGe1-x core shell heterostructures through the vapor liquid solid mechanism for the Si core, followed in situ by the epitaxial Si-SixGe1-x shell growth using ultrahigh vacuum chemical vapor deposition. The Raman spectra of individual nanowires reveal peaks associated with the Si-Si optical phonon mode in the Si core and the Si-Si, Si-Ge, and Ge-Ge vibrational modes of the SixGe1-x, shell. The core Si-Si mode displays a clear red-shift compared to unstrained, bare Si nanowires thanks to the lattice mismatch-induced tensile strain, in agreement with calculated values using a finite-element continuum elasticity model combined with lattice dynamic theory. N-type field-effect transistors using Si-SixGe1-x core shell nanowires as channel are demonstrated.
机译:相干应变的Si-SixGe1-x核-壳纳米线异质结构有望具有正的壳对核导带偏移,从而允许电子在Si核中进行量子约束。我们报告了通过硅芯的气液固相机理,外延,相干应变的Si-SixGe1-x核壳异质结构的生长,随后通过超高真空化学气相沉积原位生长了外延Si-SixGe1-x壳。单个纳米线的拉曼光谱显示出与Si核中的Si-Si光学声子模式以及SixGe1-x壳的Si-Si,Si-Ge和Ge-Ge振动模式相关的峰。与晶格失配引起的拉伸应变相比,与未应变的裸露硅纳米线相比,硅芯Si-Si模式显示出明显的红移,这与使用有限元连续体弹性模型结合晶格动力学理论的计算值相符。展示了使用Si-SixGe1-x核壳纳米线作为沟道的N型场效应晶体管。

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