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Interference enhancement in spectral domain interferometric measurements on transparent plate

机译:透明板上光谱域干涉测量中的干扰增强

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In spectral domain interferometry, the interference signal generated by directly reflected waves from the two surfaces of a sample plate under test is greatly enhanced by the blockage of those light waves reflected by the two arm mirrors in the Michelson interferometer. This sample surface-reflected interference signal, being the optical path length of the plate, is therefore identifiable directly from the Fourier-transformed interference spectrum. Consequently, the group refractive index and physical thickness of the plate can be obtained simultaneously without any prior information of them. Moreover, subsequent in situ angular scanning on the interference spectra helps to retrieve the wavelength-dependent phase refractive index and first-order dispersion. The order of magnitude of the relative error for the group refractive index is 10~(-4), while that for the phase refractive index and the physical thickness is 10~(-3).
机译:在光谱域干涉测量法中,由于被迈克尔逊干涉仪中的两个臂镜所反射的那些光波被阻挡,大大增强了来自被测样品板两个表面的直接反射波所产生的干涉信号。因此,可以直接从傅立叶变换的干涉光谱中识别出该样品表面反射的干涉信号,即板的光程长度。因此,可以在没有它们的任何先验信息的情况下同时获得板的组折射率和物理厚度。此外,随后在干涉光谱上进行原位角扫描有助于检索依赖于波长的相位折射率和一阶色散。组折射率的相对误差量级为10〜(-4),相折射率和物理厚度的相对误差量级为10〜(-3)。

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