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High-resolution wide-dynamic range electronically scanned white-light interferometry

机译:高分辨率宽动态范围电子扫描白光干涉仪

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摘要

A novel high-resolution wide-dynamic range electronically scanned white-light interferometry-based interrogation technique is presented. By using off-the-shelf optical components, this technique is capable of reaching a subnanometer resolution. The technique relies on a simple optical setup in which the wedge and camera axes are mutually inclined for a very small angle in the horizontal plane and two-dimensional fringe pattern analysis. Resolution below 0.3 nm and dynamic range of 106 dB have been achieved with a signal-to-noise ratio lower than 25 dB.
机译:提出了一种新颖的高分辨率宽动态范围电子扫描白光干涉法的询问技术。通过使用现成的光学组件,该技术能够达到亚纳米分辨率。该技术依赖于简单的光学设置,其中楔形轴和相机轴在水平面中相互倾斜一个很小的角度,并进行二维条纹图案分析。实现了低于0.3 nm的分辨率和106 dB的动态范围,信噪比低于25 dB。

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