Measured and simulated performance of a ceramic micromechanical beam steering device at 94 GHz

摘要

We report the first experimental demonstration of a transmission-mode micromechanical beam steering device for use in standoff terahertz imaging and spectroscopy. The device was constructed by laminating laser-cut 96percent alumina sheets to form two plates with interlocking rectangular gratings of 762 (mu)m period and was characterized at 94 GHz in a free-space measurement setup with an automated elevation scan. Plate tilts as great as 6 deg deflected the transmitted beam by 6 deg for the transverse electric (TE) polarization and by 4 deg for the transverse magnetic polarization. Finite-difference time-domain simulations of the TE performance were in good agreement with the measurements.