PLZT Ceramic Based Electro-Optic Beam Steering Device for Optical Interconnectionand Pathway Adjustment

摘要

An optical steering device based on a substrate of PLZT ceramic has beendeveloped. On-substrate resistors were fabricated by evaporating a less conductive metal, and the resistance was controlled by varying the length of the metal film bar that connects two adjacent electrodes. A steering ability was experimentally demonstrated, which is in agreement with both the predicted estimation and the precise computer simulation. A fast time response and good beam quality were also observed. This device can have applications in laser disk tracking and/or fine alignment of board-to-board optical interconnections. To decrease the applied voltage, this PLZT substrate with large quadratic electro-optic coefficients should be used. The steering range achieved by this design is relatively small, but it is a continuous steering. When combined with a discrete steering device such as a blazed grating, a large steering range can be achieved.