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Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

机译:使用二调制器广义椭偏显微镜的正入射广义椭偏仪

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摘要

A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 (mu)m. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO_(2)), and calcite (CaCO_(3)).
机译:描述了一种新的显微镜,该显微镜能够在垂直入射反射下测量材料的偏振特性,并证明横向分辨率为4μm。该仪器测量样品穆勒矩阵的八个参数,这些参数可能与衰减,延迟,圆衰减,主轴方向和偏振系数有关。通过适当的校准,小数值样品穆勒矩阵的八个元素可以确定为优于0.001-0.002。给出了铝,金红石(TiO_(2))和方解石(CaCO_(3))的示例。

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