Six-degrees-of-freedom alignment technique that provides diagnostic misalignment information

摘要

We introduce a new six-degrees-of-freedom alignment technique that enables the precise alignment of two optical device planes. The method combines linear diffraction gratings and cylindrical Fresnel lenses that allow the diagnosis of misalignment in each degree of freedom independently. The technique was used to align two 20 mm×20 mm fused-silica substrates separated by 17 mm. The worst-case alignment precision was found to be better than ±5 μm laterally, ±20 μm longitudinally, ±0.036° rotationally, and ±0.007° in tilt.