The ability of the ion mobility spectrometry (IMS) technique with a negative corona discharge (CD) ion source to detect trace amounts of impurities in high-purity O_(2) has been explored. The processes of the formation of negative ions in negative CD IMS have been studied using the ion mobility spectrometry/mass spectrometry (IMS/MS) technique. The CD IMS and CD IMS/MS spectra of 5.0 and 6.0 oxygen with and without additional purification (CO_(2) and H_(2)O removal) have been measured. It has been proven that the trace amounts of N_(2) in high-purity O_(2) can be monitored using the CD IMS and/or CD IMS/MS technique.
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