Ion Mobility Spectrometry for Monitoring High-Purity Oxygen

摘要

The ability of the ion mobility spectrometry (IMS) technique with a negative coronandischarge (CD) ion source to detect trace amounts of impurities in high-purity O2 has beennexplored. The processes of the formation of negative ions in negative CD IMS have been studiednusing the ion mobility spectrometry/mass spectrometry (IMS/MS) technique. The CD IMS andnCD IMS/MS spectra of 5.0 and 6.0 oxygen with and without additional purification (CO2 andnH2Oremoval) have been measured. It has been proven that the trace amounts ofN2 in high-puritynO2 can be monitored using the CD IMS and/or CD IMS/MS technique.