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Calcium-Assisted Glass-to-Glass Bonding for Fabrication of Glass Microfluidic Devices

机译:钙辅助玻璃-玻璃键合,用于制造玻璃微流体装置

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Glass is a desired material for many microfluidics applications. It is chemically resistant and has desirable characteristics for capillary electrophoresis. The process to make a glass chip, however, is lengthy and inconvenient, with the most difficult step often being the bonding of two planar glass substrates. Here we describe a new glass bonding technique, which requires only washing of the glass surfaces with a calcium solution and 1-2 h of bonding at 115 deg C. We found calcium uniquely allows for this simple and efficient low-temperature bonding to occur, and none of the other cations we tried (e.g., Na~(+), Mg~(2+), Mn~(3+)) resulted in satisfactory bonding. We determined this bond is able to withstand high applied field strengths of at least up to 4 kV(centre dot)cm~(-1). When intense pressure was applied to a fluid inlet, a circular portion of the coverslip beneath the well exploded outward but very little of the glass-glass interface debonded. In combination with the directed hydrofluoric acid etching of a glass substrate using a poly(dimethylsiloxane) (PDMS) etch guide, we were able to make glass chips with better than 90percent yield within 6 h. This technique is compatible with inexpensive unpolished glass and is limited in resolution by the PDMS etch guide used and the intrinsic properties of isotropic etching.
机译:玻璃是许多微流体应用中所需的材料。它具有化学抗性,并具有毛细管电泳所需的特性。然而,制造玻璃芯片的过程冗长且不便,最困难的步骤通常是两个平面玻璃基板的粘合。在这里,我们描述了一种新的玻璃粘合技术,该技术仅需要用钙溶液清洗玻璃表面并在115摄氏度下粘合1-2小时。我们发现钙独特地允许这种简单而有效的低温粘合发生,而我们尝试过的其他阳离子(例如Na〜(+),Mg〜(2 +),Mn〜(3+))均未产生令人满意的键合。我们确定该键能够承受至少4 kV(中心点)cm〜(-1)的高施加电场强度。当向流体入口施加高压力时,井下面的盖玻片的圆形部分向外爆炸,但很少有玻璃-玻璃界面脱粘。结合使用聚(二甲基硅氧烷)(PDMS)蚀刻指南对玻璃基板进行定向氢氟酸蚀刻,我们能够在6小时内以高于90%的成品率制造玻璃碎片。该技术与廉价的未抛光玻璃兼容,并且分辨率受所用PDMS蚀刻指南和各向同性蚀刻的固有特性的限制。

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