UV photon-induced surface modification of plastics by using excimer laser/excimer lamp

摘要

Surface modification of a selective area of plasticswas accomplished by using an ArF excimer laser or an excimerlamp. The chemical stability of the plastics is attributed to thepresence of C-H, C-F, C-Cl or C=O bonds. Plastic sheets werephotochemically modified to be hydrophilic or metallicproperties with ultra violet photons and chemical solutions. Thechemical solution was sandwiched between the sample surfaceand a silica glass window. With UV photons, the solutions andsample surfaces were excited. In the case of the hydrophilicmodification, the surfaces were dehydrogenated or difluorinatedby the H or B atoms which were photodissociated from H2O orB(OH)3 aqueous solution, and replaced the photodissociated OHradicals. In the case of the metal deposition on the plasticsurfaces, the copper sulfate aqueous solution was used. As aresult conductive circuit patterns Cu thin films were deposited onthe sample surfaces.