Particle removal of a non-metallic ESP for particles and mist in corrosive gases from semiconductor manufacturing industries

摘要

We have developed a novel non-metallic two-stage ESP that uses carbon brush chargers at the center of the grounded channels of carbon fiber reinforced polymer, and uses polyvinyl chloride collection plates into which metallic films are inserted. The collection performance of the ESP downstream of a wet scrubber with packing balls was evaluated with SiO_2 and mist particles. The results showed that the electrical performance of the ESP (16 channels, 400×400 mm~2) was maintained with different materials of the channels and decreasing the size to 50 mm. The ESP (16 channels with 100 mm length, 400×400 mm~2×540 mm with 10 mm gap) removed more than 90% of SiO_2 and mist particles with 10 kV and 12 kV applied to the ESP at 2 m/s and 3.6 L/m~3. It was also found that the average collection efficiency of the ESP for one month at the demonstration site, 97% based on particle number and 92% on total particle mass, was achieved with a much smaller specific corona power of 0.28 W/m~3/hr, compared to conventional ESPs.