Possibility of a new finishing method with well-arranged micro-asperity arrays (A well-arranged micro-asperity arrays by anisotropic etching and a MAGIC tool)

Noritsugu Umehara

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Possibility of a new finishing method with well-arranged micro-asperity arrays (A well-arranged micro-asperity arrays by anisotropic etching and a MAGIC tool)

机译：一种新的精加工方法的可能性，该方法具有排列合理的微粗糙阵列（通过各向异性蚀刻和MAGIC工具排列的排列良好的微粗糙阵列）

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来源
《砥粒加工学会誌》 |2001年第6期|共5页
作者
Noritsugu Umehara;
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原文格式 PDF
正文语种 jpn
中图分类磨削加工与磨床;
关键词
Polishing; Arrangement; Asperity; Anisotropic Etching; Roughness;

机译：抛光;排列;粗糙度;各向异性蚀刻;粗糙度;

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专利

1. Possibility of a new finishing method with well-arranged micro-asperity arrays (A well-arranged micro-asperity arrays by anisotropic etching and a MAGIC tool) [J] . Noritsugu Umehara 砥粒加工学会誌 . 2001,第6期

机译：一种新的精加工方法的可能性，该方法具有排列合理的微粗糙阵列（通过各向异性蚀刻和MAGIC工具排列的排列良好的微粗糙阵列）
2. Emergence and Shift of Coulomb Blockade Threshold in Well-Arranged Two-Dimensional Arrays of Nanodots: A Simulation Study [J] . H. Abbasi, H. Sedghi, M. Khaje Journal of computational and theoretical nanoscience . 2015,第11期

机译：Coulomb封锁阈值在纳米井井二维阵列中的ulomb封锁阈值的出现和转移：模拟研究
3. Well-arranged novel InGaN hexagonal nanoplates at the tops of nitrogen-polarity GaN nanocolumn arrays [J] . Tetsuya Kouno (光野徹也), Katsumi Kishino (岸野克巳) AIP Advances . 2012,第1期

机译：氮极性GaN纳米柱阵列顶部排列合理的新型InGaN六角形纳米板
4. Fabrication of micro-lens array obtained by anisotropic wet etching of silicon [C] . Catalin Parvulescu, Elena Manea, Paul Schiopu, International conference on diffusion in solids and liquids, mass transfer-heat transfer-microstructure properties-nanodiffusion and nanostructured materials . 2016

机译：通过硅的各向异性湿蚀刻获得的微透镜阵列的制造
5. Improving Template-based Nanomanufacturing of Carbon Nanotube Arrays Via Polishing Wet Etching Method [D] . Samadi, Kosar. 2020

机译：通过抛光湿法蚀刻方法改善基于模板的碳纳米管阵列纳米成制造方法
6. Coulomb Blockade Effect in Well-Arranged 2D Arrays of Palladium Nano-Islands for Hydrogen Detection at Room Temperature: A Modeling Study [O] . Mahdi Khaje, Hassan Sedghi, Hadi Goudarzi, 2020

机译：库仑封锁效果在布置良好的2D钯纳米岛阵列中在室温下进行氢检测：建模研究
7. Coulomb Blockade Effect in Well-Arranged 2D Arrays of Palladium Nano-Islands for Hydrogen Detection at Room Temperature: A Modeling Study [O] . Mahdi Khaje, Hassan Sedghi, Hadi Goudarzi, 2020

机译：库仑封锁效果在布置良好的2D钯纳米岛阵列中，在室温下进行氢检测：建模研究

Possibility of a new finishing method with well-arranged micro-asperity arrays (A well-arranged micro-asperity arrays by anisotropic etching and a MAGIC tool)

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