Optical Micro-to-Nanoscale Surface Profilometry

摘要

Throughout the manufacturing processes in many prominent industries, the micro-to-nanoscale surface profilometry is frequently resorted to for the assurance of the producing quality, so that manufacturing flaws or defects can be noticed and rectified and the semi-finished product can be reworked or abandoned before any unnecessary post-process get executed. With this in-process inspection, the manufacturing process can be more efficient and the producing cost can be further reduced. In this article, two types of optical micro-to-nanoscale surface profilometry are presented and their applications are briefed.