In recent years, micro lens array (MLA) has become an important element for optical systems. One of the most important applications of MLA is to uniform the intensity of light. The alignment construction of double-sided MLA is easier than one-sided MLA. The MLA fabricated by glass materials could be used in high energy systems or high temperature environment, such as laser system. Glass based MLA could be fabricated by laser machining, photolithography and precision glass molding (PGM) technologies, but the former two technologies are not suitable for manufacturing. In this paper, we proposed a manufacturing method of double-sided MLA by laser machining and PGM technique. A micro holes array was firstly fabricated on the surface of silicon carbide (SiC) mold material with the diameter of 500 μm and depth of 200 μm. The double-sided MLA was then molded by PGM process with two molds. In this paper, the parameters including laser pulse repetition rate, laser scanning speed, molding temperature and molding force, and the characteristics of double-sided MLA such as profile and refractive index were discussed. We obtained the result that the double-sided MLA with the diameter of 20 mm and each lens with the height of 52 μm, the radius of 851 μm, and the pitch of 700 μm on soda lime glass.
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