Combining the long research results and nanofabrication technology supported by National Nanoscience and Nanotechnology Program, we successfully developed and implemented a compact transmission X-ray microscope (TXM) based on a cylindrical symmetry around the optical axis sharply limits the instabilities due to thermal mechanical drift. Identical, compact multi-axis closed-loop actuation modules drive different optical components. The design is modular and simplifies the change of individual parts, e.g., the use of different magnification and focusing devices. This compact instrument can be easily transported between laboratory and synchrotron facilities and quickly put in operation. An automated alignment mechanism simplifies the assembling of different modules after transportation. This prototype is tested with synchrotron X-rays demonstrated effective elimination of the thermo-drift problem and achieved ～30 nm lateral resolution. The whole system can be packed into standard shipping case and reassembled within 1 hour for full operation.
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