The further development of research and engineering in microtronics

摘要

The results of the recent (after the issue of the previous survey paper[1]) research and designs in the field of microtronics as well as the development trends in this field of instrumentation are discussed. Brief characteristics of many newlydesigned microtronic devices, named Micro-electromechanical Systems (MEMS) are presented. Main directions of MEMS research and development are analyzed, which were reported at the MEMS workshops in USA, Japan and other countries. Much attention is paid to the problems, which hamper wider industrial installation of the MEMS, and to the ways proposed of overcoming these difficulties.