Study on Basic RF characteristics of transmission lines employing additional ground plane on semiconducting substrate

摘要

In this paper, we studied about the transmission line employing second ground plane on silicon substrate. In the proposed transmission line structure, a signal line and original ground planes exist on the top layer, and a SiO_2 thin-film exists between the second ground plane and signal line. The wavelength of the proposed transmission line structure was highly reduced compared with conventional coplanar waveguide on silicon substrate due to additional periodical capacitance between signal line and second ground plane.