Low voltage cathodoluminescent properties of Y{sub}2O{sub}3 thin film doped with rare earths

摘要

Rare-earths (thulium, terbium, europium) doped yttrium oxide thin film phosphors are prepared by electron beam evaporation method on amorphous quartz, ITO and ZnO film on quartz substrates. The crystallinity of the films depended on the kind of substrate and substrate temperatures. It was found that the crystallinity and CL luminance of Y{sub}2O{sub}3:Tm film deposited on ZnO film with strong [0001] orientation showed much better than that of the Y{sub}2O{sub}3:Tm film on ITO glass substrate. Y{sub}2O{sub}3:Tb and Y{sub}2O{sub}3:Eu films were tried as blue, green and red emitting thin film phosphors, respectively. These thin film phosphors showed the color coordinates of Tm(0.13,0.07), Tb(0.58,0.35) and Eu(0.32,0.57). Moreover, those phosphor films showed 2.19(Tm), 187.0(Tb) and 89.4cd/m{sup}2(Eu) at 3kv, 60μA/cm{sup}2. It is expected from these results that the RGB emitting Y{sub}2O{sub}3 thin films activated with rare earths have potentiality for field emission displays with high luminescence and good chromaticity.