An Approach to Logical Behavior of Memory Devices in Coupled MEMS Resonators

摘要

We focus on logical behavior of electrostatically excited MEMS (Micro Electro-Mechanical Systems) resonators with nonlinear characteristics. A MEMS resonator exhibits bistable and hysteretic responses at large amplitude excitation. It was experimentally reported that the nonlinear MEMS resonator can be used as a memory device. On the other hand, it was also demonstrated that coupled mechanical resonators can be applied to an XOR logic gate. Based on these preceding results, we try to achieve a 2-bit binary counter in coupled nonlinear MEMS resonators by numerical simulations.