首页> 外文期刊>Journal of Ceramic Processing Research. (Text in English) >Effects of substrate etching, Sn~(+2) doping and surfactant addition on the morphology of chemically deposited zinc oxide films
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Effects of substrate etching, Sn~(+2) doping and surfactant addition on the morphology of chemically deposited zinc oxide films

机译:衬底刻蚀,Sn〜(+2)掺杂和表面活性剂添加对化学沉积氧化锌膜形貌的影响

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摘要

The effect of substrate etching by HF, doping by SnCl2 and the addition of a surfactant such as Tiron on the morphology and growth rate of zinc oxide deposits is investigated. The layer is produced on a high purity alumina (HPA) substrate by two-stage chemical deposition (TSCD) from a solution containing an ammonium zinc complex. Etching does not affect the structure of films thinner than 400 nm. It has, however, a considerable effect on the structure of films greater than 800 nm. The latter is produced by 70 times dipping of the substrate into the ZnO containing solution. It is seen that 100 times of dipping results in the formation of acicular grains on the initially formed grains. The addition of 2 drops per lit (d/l) of Tiron changes the surface morphology and causes the formation of a fine-grained structure. Further addition of Tiron causes poisoning of the nucleation stage and coarsens the grains. The same effect is observed with Sn-doping of the film. Adding more than 2% Sn as a dopant induces poisoning of the nucleation stage and hinders the formation of fine grains. Combined substrate etching and Tiron addition effects are discussed in this paper.
机译:研究了用HF进行基板蚀刻,用SnCl2掺杂以及添加表面活性剂(例如Tiron)对氧化锌沉积物的形态和生长速率的影响。通过两步化学沉积(TSCD),从包含铵锌络合物的溶液中在高纯度氧化铝(HPA)基材上生产该层。蚀刻不影响小于400 nm的薄膜的结构。然而,它对大于800nm的膜的结构具有相当大的影响。后者是通过将基材浸入含ZnO的溶液中70次而制成的。可以看出,浸渍100次导致在最初形成的晶粒上形成针状晶粒。每升Tiron每升(d / l)添加2滴会改变表面形态,并导致形成细颗粒结构。进一步添加铁会导致成核阶段中毒并使晶粒粗化。在薄膜的锡掺杂中观察到相同的效果。添加超过2%的Sn作为掺杂剂会引起成核阶段中毒并阻碍细晶粒的形成。本文讨论了组合的衬底刻蚀和Tiron添加效果。

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