ASTM MEMS STANDARDS COMMITTEE PURDUES NIST'S RECOMMENDATIONS FOR TWO NEW MEMS STANDARDS

摘要

As a result of a NIST researcher's extensive testing and analysis for the first MEMS Residual Stress Round Robin experiment. Two new microelectromechanical systems (MEMS) metrology standards will be developed: one for linear dimensional metrology and one for out-of -plane static deflection measurements. Marshall was nominated by the ASTM committee to write these standards.MEMS is a rapidly growing component of the semiconductor industry. A recent market study has shown MEMS to have an annual growth rate of 20 percent to 30 percent with total sales of components expected to exceed