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Optical layout of a beamline for photoemission microscopy

机译:用于光发射显微镜的光束线的光学布局

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An optical layout for performing photoemission microscopy using synchrotron light from the storage ring Elettra is described. The microscope, property of the Technical University of Clausthal, was installed on an existing monochromator and the light is deflected and focused by two toroidal mirrors. A light spot of approx 30#mu#m diameter and a photon energy range from 45 to 160eV has been achieved. The light illuminates the sample in the microscope at grazing incidence and chemical contrast is observed in photoemission. Apart from the standard photoemission mode of operation with synchrotron radiation, surface NEXAFS spectra from microspot areas can be measured, and an example is shown. Images can also be obtained with variable kinetic energies (and therefore variable surface sensitivity) of the secondary electrons while working in NEXAFS mode. The obliquely incident soft X-rays cause shadows due to topography on the surface, which allows an estimate of the height of features. Three-dimensional islands give rise to Fresnel diffraction and many fringes may be visible. This effect and its consequences for chemical imaging are discussed.
机译:描述了用于使用来自存储环Elettra的同步加速器光进行光发射显微镜检查的光学布局。显微镜是克劳斯塔尔技术大学的财产,被安装在现有的单色仪上,光线被两个环形镜偏转和聚焦。已经实现了直径约为30#μm的光斑,光子能量范围为45至160eV。光以掠入射的方式照亮显微镜中的样品,并且在光发射中观察到化学对比。除了使用同步加速器辐射的标准光发射操作模式以外,还可以测量微点区域的表面NEXAFS光谱,并显示一个示例。在NEXAFS模式下工作时,还可以使用具有可变动能(因此具有可变的表面灵敏度)的二次电子来获得图像。倾斜入射的软X射线由于表面的形貌而导致阴影,从而可以估计特征的高度。三维岛会引起菲涅耳衍射,并且可能会看到许多条纹。讨论了这种效应及其对化学成像的影响。

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