Characteristics of ZnO Nano-Crystals Grown onAl-doped ZnO Thin Films Deposited by Using the PLD Method

摘要

ZnO nano-crystal thin films were fabricated on Al-doped ZnO/Si0_2/Si substrates prepared byusing pulsed laser deposition with a solvothermal technique at a low temperature. The Al-dopedZnO substrate and ZnO nano-crystal thin films were preferably oriented in the (001) direction.In films, nucleation can be facilitated by the presence of the substrate, which constitutes a sitefor heterogeneous nucleation. ZnO nanorods were grown on Al-doped ZnO substrates in lengths of178.8, 851.4, and 916.2 mn for growing time of 24, 48, and 96 h, respectively. The ZnO nanorod thinfilm arrays with diameters of 45 ti 100 nm were separated by gaps of 30 ~ 90 nm. Photoluminescence(PL) spectroscopy using a He-Cd laser (325 nm, 40 mW) was employed to characterize the ZnOnanorod thin films. A strong blue emission centered at 377 nm was clearly observed at roomtemperature.