Design and Optimization of a Low Power Pressure Sensor for Wireless Biomedical Applications

摘要

A blood pressure sensor suitable for wireless biomedical applications is designed and optimized. State-of-the-art blood pressure sensors based on piezoresistive transducers in a full Wheatstone bridge configuration use low ohmic values because of relatively high sensitivity and low noise approach resulting in high power consumption. In this paper, the piezoresistance values are increased in order to reduce by one order of magnitude the power consumption in comparison with literature approaches. The microelectromechanical system (MEMS) pressure sensor, the mixed signal circuits signal conditioning circuitry, and the successive approximation register (SAR) analog-to-digital converter (ADC) are designed, optimized, and integrated in the same substrate using a commercial 1 mu m CMOS technology. As result of the optimization, we obtained a digital sensor with high sensitivity, low noise (0.002 mu V/Hz), and low power consumption (358 mu W). Finally, the piezoresistance noise does not affect the pressure sensor application since its value is lower than half least significant bit (LSB) of the ADC.