Effects of Angle Misalignments on Pitch Measurements of Two-dimensional Gratings Using an AFM

摘要

Calibration procedures of two-dimensional (2D) gratings using an atomic force microscope (AFM) were investigated. To perform the pitch measurements with an uncertainty less than 1 nm, fine adjustments of rotation angles were required on setting the samples. We used a rotary stage with a resolution less than 0.1 degrees. The compensation for a cosine error caused by the angle misalignments was mathematically difficult. The accurate setting of the sample was a key technique.