Design of a Soft X-ray and Extreme UV Reflectometer Equipped with a High-Resolution Monochromator and High-Brightness Laser-Plasma Radiation Source

摘要

The design of a reflectometer intended for investigating the reflection and transmission coefficients of components of X-ray optics in the wavelength range of 1-25 nm is described. A Czerny-Turner spectrometer with a planar diffraction grating and parabolic collimators is employed to monochromatize the radiation. The required geometry of the monochromatic probe beam is ensured by means of a toroidal mirror. The X-ray source is laser plasma. The expected average spectral radiation power on the sample under study is on the order of 10~7 photon/s in the spectral band 0.1 nm. A goniometer provides five and two degrees of freedom of the sample 500 mm in diameter and detector, respectively.