AES and XPS studies of a por-Si/SnOx nanocomposite formed using a powerful ion beam of nanosecond duration

摘要

The results of the X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and scanning electron microscopy (SEM) investigations of tin-oxide nanolayers on samples of por-Si/SnOx composites with varying matrix porosity, formed using a powerful ion beam of nanosecond duration, are presented. It is shown that rapid melting and crystallization of the surface leads to the formation of Si nanoparticles with a maximal size of 200 nm. It is established that tin is included in the structure of the nanocomposite in an oxidized state with a small inclusion of metallic β tin. With increasing porosity, the phase composition of the tin nanolayers becomes closer to the state corresponding to the highest tin oxide (SnO2). It is also shown that, upon an increase in the porosity, the intensity of the tin 4d subvalent line increases, which is, apparently, associated with an enhanced degree of hybridization of tin and oxygen atoms. The changes in the elemental composition of the composite and the depth of tin penetration are estimated from the results of ion etching.