A Novel Way to Fabricate SAW Actuation Device with Two Different Methods

摘要

In recent years, SAW (Surface Acoustic Wave) actuator has been reported to be used as nanometer resolution step motor. There have been many reports on SAW motor with aluminum IDT (InterDigi-tal Transducer) but no reports on SAW motor with copper IDT. Copper has many advantages over aluminum. In this research, for the first time, copper is used as the fabrication material of IDT and a linear motor operating at about 10 MHz on a 127.8 degrees rotated Y-cut X-propagation LiNbO_3 wafer with a diameter of three inches is fabricated. Two different fabrication methods-electroplating and etching-are adopted and compared deliberately, a reasonable fabrication method and corre-sponding parameters are obtained. FEM (finite element method) analysis is done by using ANSYS and property related with frequency is obtained.