Comparative Study for Displacement Detection of Micro-Device

摘要

Technique of displacement testing is the important support for MEMS from study stage to industry stage. Three Micro-device displacement testing techniques are discussed: testing technique based on blur image synthesis, testing technique based on block matching, testing technique based on optical flow. Merits, demerits and scope of application for every method are analyzed. As resonator testing target, corresponding testing results are obtained. These three testing techniques are verified by experiments. Experimental results indicate that principle of testing technique based on blur image synthesis is simpler and lower requirement to hardware system. But the precision is lower. Testing technique based on block matching and technique based on optical flow have special requirement to hardware system. But they have higher precision. Testing technique based on block matching fits to test object with in-plane movement. Testing technique based on optical flow fits to test object with out of plane movement.