Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment

摘要

This paper details the development of an inertia-driven X-Y microstage and simple gripper for a pick-up lens in Blu-ray disc alignment incorporating inertia-driven microsliders on V-shaped grooves and a micropart handler. The microslider is driven by impact generated by a mass connected with a piezo element. We made a kinematic model for theoretical analysis on the X-Y microstage and gave the microinertia X-Y stage a sophisticated design. The X stage is stacked on the Y stage to provide fine in-plane positioning. Practical applications include multiple lens component assembly in which the optical lens must be centered within a tolerance of less than 100 nm. Experiments confirmed successful achievement of this microlens positioning in the center of the reference lens axis as observed by the laser interference fringe.