Chemically non-equilibrium modelling of N-2 thermal ICP at atmospheric pressure using reaction kinetics

摘要

A two-dimensional hydrodynamic model for an N-2 inductively coupled thermal plasma (ICTP or thermal ICP) at atmospheric pressure was developed using reaction rates without the chemical equilibrium (CE) assumption. Particle composition distribution in the N-2 ICTP was derived by solving the mass conservation equations for each of the particles, considering diffusion, convection and production terms. The electrical conductivity, mass density and diffusion coefficient were calculated at each of the calculation steps with the derived particle composition distributions. Using this model, the influence of gas flow rate on chemical composition distribution was investigated. The dependence of mass flow of N atom on gas flow rate was obtained. From the result, a large deviation from CE in the distribution of the particle composition was found, especially near the wall of the ICTP. [References: 25]