Structure analysis of nanostructured TiO2 thin films using transmission electron microscopy

摘要

The study of TiO2 thin films obtained by the chemical solution deposition method is reported. The film thickness is 40 nm. An original technique is used for lifting the TiO2 film from the substrate. The samples are examined by transmission electron micrography (TEM) in the diffraction contrast (bright field image) mode, selected area electron-diffraction imaging and convergent beam electron diffraction imaging. The TiO2 films are nanocrystalline with random orientations. The size of crystallites depends on the annealing temperature. The form of the nanocrystallites indicates the TiO2 anatase phase. The TEM images are compared with the results from scanning electron micrography.