Micro-optical devices formed by a dynamic photolithographic approach

摘要

We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated.